Chemically amplified positive resist composition

ABSTRACT

The present invention provides a chemically amplified positive composition comprising: a resin comprising a structural unit represented by the formula (I): 
     
       
         
         
             
             
         
       
     
     wherein R 1  represents a hydrogen atom, a halogen atom, a C1-C4 alkyl group or a C1-C4 perfluoroalkyl group, Z represents a single bond or —(CH 2 ) k —CO—X 4 —, k represents an integer of 1 to 4, X 1 , X 2 , X 3  and X 4  each independently represents an oxygen atom or a sulfur atom, m represents an integer of 1 to 3 and n represents an integer of 0 to 3, and an acid generator.

This nonprovisional application claims priority under 35 U.S.C. §119(a) on Patent Application No. 2008-203966 filed in JAPAN on Aug. 7, 2008, the entire contents of which are hereby incorporated byreference.

FIELD OF THE INVENTION

The present invention relates to a chemically amplified positive resist composition.

BACKGROUND OF THE INVENTION

A chemically amplified positive resist composition used for semiconductor microfabrication employing a lithography process contains an acid generator comprising a compound generating an acid by irradiation.

US 2005/0158656 A1 discloses a chemically amplified positive resist composition comprising a resin which comprises a structural unit having a cyclohexyl group or a cyclopentyl group and an acid generator.

SUMMARY OF THE INVENTION

The present invention is to provide a chemically amplified positive resist composition.

The present invention relates to the followings:

<1> A chemically amplified positive resist composition comprising: a resin comprising a structural unit represented by the formula (I):

wherein R¹ represents a hydrogen atom, a halogen atom, a C1-C4 alkyl group or a C1-C4 perfluoroalkyl group, Z represents a single bond or —(CH₂)_(k)—CO—X⁴—, k represents an integer of 1 to 4, X¹, X², X³ and X⁴ each independently represents an oxygen atom or a sulfur atom, m represents an integer of 1 to 3 and n represents an integer of 0 to 3, and an acid generator; <2> The chemically amplified positive resist composition according to <1>, wherein the resin contains a structural unit having an acid-labile group in a side chain in addition to the structural unit represented by the formula (I); <3> The chemically amplified positive resist composition according to <2>, wherein the structural unit having an acid-labile group in a side chain is a structural unit represented by the formula (II):

wherein R²¹ represents a hydrogen atom, a halogen atom, a C1-C4 alkyl group or a C1-C4 perfluoroalkyl group, R^(b), R^(c) and R^(d) independently represents a C1-C6 alkyl group or a C3-C12 alicyclic hydrocarbon group, or R^(b) and R^(c) may be bonded to form a C3-C20 cyclic hydrocarbon group which may be substituted, Z″ represents a single bond or —(CH₂)_(r)—COO—, and r represents an integer of 1 to 4; <4> The chemically amplified positive resist composition according to any one of <1> to <3>, wherein the acid generator is an acid generator represented by the formula (V):

wherein Y¹ and Y² each independently represent a fluorine atom or a C1-C6 perfluoroalkyl group, R¹² represents a C1-C30 linear, branched chain or cyclic hydrocarbon group which may be substituted with at least one selected from the group consisting of a C1-C6 alkyl group, a C1-C6 alkoxy group, a C1-C4 perfluoroalkyl group, a hydroxyl group and a cyano group, and one or more —CH₂— in the hydrocarbon group may be replaced by —CO—, —O— or —COO—, and A⁺ represents an organic counter ion; <5> The chemically amplified positive resist composition according to <4>, wherein R¹² in the formula (V) is a group represented by the formula:

-Z′-X¹⁰

wherein X¹⁰ represents a C3-C30 monocyclic or polycyclic hydrocarbon group having a hydroxyl group or a carbonyl group, and one or more hydrogen atoms in the monocyclic or polycyclic hydrocarbon group may be replaced by a C1-C6 alkyl group, a C1-C6 alkoxy group, a C1-C4 perfluoroalkyl group, a C1-C6 hydroxyalkyl group, a hydroxyl group or a cyano group and Z′ represents a single bond or a C1-C4 alkylene group; <6> The chemically amplified positive resist composition according to <4>, wherein the organic counter ion is a cation represented by the formula (IXe):

wherein P²², P²³ and P²⁴ each independently represent a hydrogen atom, a hydroxyl group, a C1-C12 alkyl group or a C1-C12 alkoxy group; <7> The chemically amplified positive resist composition according to any one of <1> to <6>, wherein the resin has no structural unit having a fluorine atom in a side chain.

DESCRIPTION OF PREFERRED EMBODIMENTS

The present resist composition comprises a resin comprising a structural unit represented by the formula (I):

wherein R¹ represents a hydrogen atom, a halogen atom, a C1-C4 alkyl group or a C1-C4 perfluoroalkyl group, Z represents a single bond or —(CH₂)_(k)—CO—X⁴—, k represents an integer of 1 to 4, X¹, X², X³ and X⁴ each independently represents an oxygen atom or a sulfur atom, m represents an integer of 1 to 3 and n represents an integer of 0 to 3 (hereinafter, simply referred to as the structural unit (I)).

Examples of the halogen atom include a fluorine atom. Examples of the C1-C4 alkyl group include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group and tert-butyl group, and a methyl group is preferable. Examples of the C1-C4 perfluoroalkyl group include a trifluoromethyl group, a pentafluoroethyl group, a heptafluoropropyl group and a nonafluorobutyl group, and a trifluoromethyl group is preferable. R¹ is preferably a hydrogen atom, a C1-C4 alkyl group or a C1-C4 perfluoroalkyl group, and is more preferably a hydrogen atom, a methyl group or a trifluoromethyl group.

X¹, X² and X⁴ are preferably oxygen atoms or a sulfur atom, and X³ is preferably a sulfur atom.

In the formula (I), m is preferably 1 and n is preferably 0, 1 or 2.

Examples of a monomer used for giving the structural unit (I) include the followings:

These monomers can be produced by reacting the corresponding alcohol compounds with acryloyl chloride, methacryloyl chloride, acrylic anhydride or methacrylic anhydride.

The resin preferably contains a structural unit having an acid-labile group in a side chain in addition to the structural unit (I). In this specification, “an acid-labile group” means a group capable to eliminate by the action of an acid.

In the present specification, “ester group” means “a structure having ester of carboxylic acid”. Specifically, “tert-butyl ester group” is “a structure having tert-butyl ester of carboxylic acid”, and may be described as “—COOC(CH₃)₃”.

Examples of the acid-labile group include a structure having ester of carboxylic acid such as an alkyl ester group in which a carbon atom adjacent to the oxygen atom is quaternary carbon atom, an alicyclic ester group in which a carbon atom adjacent to the oxygen atom is quaternary carbon atom, and a lactone ester group in which a carbon atom adjacent to the oxygen atom is quaternary carbon atom. The “quaternary carbon atom” means a “carbon atom joined to four substituents other than hydrogen atom”.

Examples of the acid-labile group include an alkyl ester group in which a carbon atom adjacent to the oxygen atom is quaternary carbon atom such as a tert-butyl ester group; an acetal type ester group such as a methoxymethyl ester, ethoxymethyl ester, 1-ethoxyethyl ester, 1-isobutoxyethylester, 1-isopropoxyethylester, 1-ethoxypropoxyester, 1-(2-methoxyethoxy)ethyl ester, 1-(2-acetoxyethoxy)ethyl ester, 1-[2-(1-adamantyloxy)ethoxy]ethyl ester, 1-[2-(1-adamantanecarbonyloxy)ethoxy]ethyl ester, tetrahydro-2-furyl ester and tetrahydro-2-pyranyl ester group; an alicyclic ester group in which a carbon atom adjacent to the oxygen atom is quaternary carbon atom such as an isobornyl ester, 1-alkylcycloalkyl ester, 2-alkyl-2-adamantyl ester, and 1-(1-adamantyl)-1-alkylalkyl ester group.

The preferable structural unit having an acid-labile group in a side chain is a structural unit represented by the formula (II):

wherein R²¹ represents a hydrogen atom, a C1-C4 alkyl group or a C1-C4 perfluoroalkyl group, R^(b), R^(c) and R^(d) independently represents a C1-C6 alkyl group or a C3-C12 alicyclic hydrocarbon group, or R^(b) and R^(c) may be bonded to form a C3-C20 cyclic hydrocarbon group which may be substituted, Z″ represents a single bond or —[CH₂]_(r)—COO—, and r represents an integer of 1 to 4.

Examples of the C1-C4 alkyl group and the C1-C4 perfluoroalkyl group include the same as described above.

Examples of the C1-C6 alkyl group include the above mentioned C1-C4 alkyl group, an n-pentyl group and an n-hexyl group.

Examples of the C3-C12 alicyclic hydrocarbon group include a cyclopentyl group, a cyclohexyl group, a norbornyl group, a methylcyclopentyl group, a methylcyclohexyl group, a dimethylcyclohexyl group and a methylnorbornyl group. Examples of the C3-C20 cyclic hydrocarbon group include an adamantyl group.

R²¹ is preferably a hydrogen atom, a methyl group or a trifluoromethyl group.

Among the structural units represented by the formula (II), a structural unit (IIa) or (IIb) is preferable.

wherein R²¹ and Z″ are the same as defined above, R² represents a linear or branched chain C1-C8 alkyl group or a C3-C10 cycloalkyl group, R³ represents a methyl group, p represents an integer of 0 to 14, R⁴ and R⁵ each independently represent a hydrogen atom or a C1-C8 monovalent hydrocarbon group which may have one or more heteroatoms, or R⁴ and R⁵ may be bonded to form a C1-C8 divalent hydrocarbon group which may have at least one heteroatom which forms a ring together with the adjacent carbon atoms to which R⁴ and R⁵ are bonded, or R⁴ and R⁵ may be also bonded to form a carbon-carbon double bond between the carbon atom to which R⁴ is bonded and the carbon atom to which R⁵ is bonded, and q represents an integer of 1 to 3 (hereinafter, simply referred to as the structural unit (IIa), (IIb), respectively).

Examples of the linear or branched chain C1-C8 alkyl group include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, an isobutyl group, a sec-butyl group, an n-pentyl group, an isopentyl group, a neopentyl group, an n-hexyl group, an n-heptyl group and an n-octyl group. Examples of the C3-C10 cycloalkyl group include a cyclopentyl group, a cyclohexyl group, a cyclooctyl group, a 2-methylcyclopentyl group, a 3-methylcyclohexyl group, a 4-methylcyclohexyl group, a 2,3-dimethylcyclohexyl group, a 4,4-dimethylcyclohexyl group, a 2-norbornyl group and a 5-methyl-2-norbornyl group. Among them, a C2-C8 linear or branched chain alkyl group and a C3-C10 cycloalkyl group are preferable.

In the formula (IIa), p is preferably 0 or 1, and z″ preferably represents a single bond or —CH₂—COO—, and more preferably represents a single bond.

Examples of the C1-C8 monovalent hydrocarbon group include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, an isobutyl group, a sec-butyl group, an n-pentyl group, an n-hexyl group, an n-heptyl group and an n-octyl group.

Examples of the C1-C8 divalent hydrocarbon group formed by bonding R⁴ and R⁵ include an ethylene group and a trimethylene group.

The resin may have one or more structural units having an acid-labile group.

Examples of the monomer used for giving the structural unit (IIa) include the followings:

Examples of the monomer used for giving the structural unit (IIb) include the followings.

Among them, the structural unit (IIa) is preferable. When the structural unit (IIa) is particularly the structural unit derived from 2-ethyl-2-adamantyl acrylate, 2-ethyl-2-adamantyl methacrylate, 2-isopropyl-2-adamantyl acrylate or 2-isopropyl-2-adamantyl methacrylate, a resist composition having excellent sensitivity and heat resistance tends to be obtained.

The monomers used for giving the structural unit (IIa) can usually be produced by a reaction of the corresponding hydroxyl-containing adamantane compound with an acrylic halide or a methacrylic halide. The monomers used for giving the structural unit (IIb) can usually be produced by a reaction of the corresponding hydroxyl-containing norbornene compound with an acrylic halide or a methacrylic halide.

The resin may have a structural unit having a hydroxyl group in a side chain. In the present specification, —OH of a carboxyl group is not a hydroxyl group.

Examples of the structural unit having a hydroxyl group in a side chain include a structure having an alkyl ester group (for example, a methyl ester group and a tert-butyl ester group) in which at least one hydrogen atom is replaced by a hydroxyl group, an alicyclic ester group (for example, a cyclopentyl ester group, a cyclohexyl ester group, a norbornyl ester group, a 1-adamantyl ester group and a 2-adamantyl ester group) in which at least one hydrogen atom is replaced by a hydroxyl group.

Preferable examples of the structural unit having a hydroxyl group in a side chain include the following structural unit represented by the formula (III):

wherein R³¹ represents a hydrogen atom or a methyl group, R⁶ and R⁷ each independently represents a hydrogen atom, a methyl group or a hydroxyl group, R⁸ represents a methyl group, n′ represents an integer of 0 to 10, Z² represents a single bond or a —(CH₂)_(s)—COO— group, and s represents an integer of 1 to 4 (hereinafter, simply referred to as the structural unit (III)).

Z² preferably represents a single bond or —CH₂—COO—, and n′ is preferably 0.

The resin may have two or more kinds of the structural unit (III).

Examples of the monomer used for giving the structural unit (III) include the followings.

Among these monomers, 3-hydroxy-1-adamantyl acrylate, 3,5-dihydroxy-1-adamantyl acrylate, 3-hydroxy-1-adamantyl methacrylate, 3,5-dihydroxy-1-adamantyl methacrylate, 1-(3-hydroxy-1-adamantyloxycarbonyl)methyl methacrylate and 1-(3,5-dihydroxy-1-adamantyloxycarbonyl)methyl methacrylate are preferable since excellent resolution is obtained when the resin containing the structural unit derived from such monomer is used in the present resist composition.

3-Hydroxy-1-adamantyl acrylate, 3,5-dihydroxy-1-adamantyl acrylate, 3-hydroxy-1-adamantyl methacrylate and 3,5-dihydroxy-1-adamantyl methacrylate can be produced, for example, by reacting corresponding hydroxyl-substituted adamantane with acrylic acid, methacrylic acid, or its acid halide, and they are also commercially available.

The resin may have one or more structural units having a lactone structure.

Examples of the structural units having a lactone structure include the following structural units represented by the formulae (IVa), (IVb) and (IVc):

wherein R⁴¹ represents a hydrogen atom or a methyl group, R⁹ represents a methyl group, R¹⁰ is independently in each occurrence a carboxyl group, a cyano group or a C1-C4 hydrocarbon group, 1 represents an integer of 0 to 5, 1′ represents an integer of 0 to 3, Z³ represents a single bond or a —(CH₂)_(t)—COO— group, and t represents an integer of 1 to 4.

Examples of the C1-C4 hydrocarbon group include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, an isobutyl group and a tert-butyl group.

Z³ preferably represents a single bond or —CH₂—COO—. R¹⁰ preferably represents a methyl group, a carboxyl group or a cyano group, and 1′ is preferably 0, 1 or 2.

Examples of the monomer used for giving the structural unit represented by the formula (IVa) include the followings.

Examples of the monomer used for giving the structural unit represented by the formula (IVb) include the followings.

Examples of the monomer used for giving the structural unit represented by the formula (IVc) include the followings.

The resin may contain two or more structural units selected from the group consisting of the structural units (IVa), (IVb) and (IVc).

Among the structural units (IVa), (IVb) and (IVc), the structural unit (IVa) is preferable. The structural units derived from hexahydro-2-oxo-3,5-methano-2H-cyclopenta[b]furan-6-yl acrylate, hexahydro-2-oxo-3,5-methano-2H-cyclopenta[b]furan-6-ylmethacrylate, tetrahydro-2-oxo-3-furyl acrylate, tetrahydro-2-oxo-3-furyl methacrylate, 2-(5-oxo-4-oxatricyclo[4.2.1.0^(3.7)]nonan-2-yloxy)-2-oxoethyl acrylate and 2-(5-oxo-4-oxatricyclo[4.2.1.0^(3.7)]nonan-2-yloxy)-2-oxoethyl methacrylate are preferable in viewpoint of the adhesiveness of resist composition to a substrate.

The monomers used for giving the structural units represented by the formulae (IVa), (IVb) and (IVc) can usually be produced by a reaction of the corresponding hydroxyl-containing lactone compound with an acrylic halide or methacrylic halide.

The resin usually contains the structural unit (I) in a ratio of 1 to 30 mol %, preferably in a ratio of 3 to 20 mol % and more preferably in a ratio of 7 to 15 mol % in all structural units of the resin.

When the resin contains the structural unit having an acid-labile group in addition to the structural unit (I), the resin usually contains the structural unit having an acid-labile group in a ratio of 10 to 80 mol % and preferably in a ratio of 20 to 70 mol % in all structural units of the resin, with the proviso that the total ratio of the structural unit (I) and the structural unit having an acid-labile group does not exceed 100 mol %, although the ratio varies depending on the kind of radiation for patterning exposure, the kind of the acid-labile group, and the like.

The resin itself is insoluble or poorly soluble in an alkali aqueous solution but becomes soluble in an alkali aqueous solution by the action of an acid. The resin may have other structural unit or units.

Examples of the other structural unit include a structural unit derived from an alicyclic compound having an olefinic double bond such as a structural unit represented by the formula (1):

wherein R²⁵ and R²⁶ each independently represents a hydrogen atom, a C1-C3 alkyl group, a C1-C3 hydroxyalkyl group, a carboxyl group, a cyano group, a hydroxyl group or a —COOU group in which U represents an alcohol residue, or R²⁵ and R²⁶ can be bonded together to form a carboxylic anhydride residue represented by —C(═O)OC(═O)—; a structural unit derived from an aliphatic unsaturated dicarboxylic anhydride such as a structural unit represented by the formula (2):

and a structural unit represented by the formula (3):

The polymer containing a structural unit derived from 2-norbornene shows strong structure because the alicyclic group is directly present on its main chain and shows a property that dry etching resistance is more excellent. The structural unit derived from 2-norbornene can be introduced into the main chain by radical polymerization using, for example, an aliphatic unsaturated dicarboxylic anhydride such as maleic anhydride and itaconic anhydride together in addition to corresponding 2-norbornene. The structural unit derived from 2-norbornene is formed by opening of its double bond, and can be represented by the above-mentioned formula (1). The structural units derived from maleic anhydride and from itaconic anhydride, which are the structural units derived from aliphatic unsaturated dicarboxylic anhydrides, are formed by opening of their double bonds, and can be represented by the above-mentioned formula (2) and the formula (3), respectively.

In R²⁵ and R²⁶, examples of the C1-C3 alkyl group include a methyl group, an ethyl group, and an n-propyl group, and examples of the C1-C3 hydroxyalkyl group include a hydroxymethyl group and a 2-hydroxyethyl group.

In R²⁵ and R²⁶, the —COOU group is an ester formed from the carboxyl group, and as the alcohol residue corresponding to U, for example, an optionally substituted C1-C8 alkyl group, 2-oxooxolan-3-yl group, 2-oxooxolan-4-yl and the like are listed, and as the substituent on the C1-C8 alkyl group, a hydroxyl group, an alicyclic hydrocarbon residue and the like are listed.

Specific examples of the monomer used to give the structural unit represented by the above-mentioned formula (1) include 2-norbornene, 2-hydroxy-5-norbornene, 5-norbornene-2-carboxylic acid, methyl 5-norbornene-2-carboxylate, 2-hydroxyethyl 5-norbornene-2-carboxylate, 5-norbornene-2-methanol and 5-norbornene-2,3-dicarboxylic anhydride.

When U in the —COOU group is the acid-labile group, the structural unit represented by the formula (1) is a structural unit having the acid-labile group even if it has the norbornane structure. Examples of monomers giving structural unit having the acid-labile group include tert-butyl 5-norbornene-2-carboxylate, 1-cyclohexyl-1-methylethyl 5-norbornene-2-carboxylate, 1-methylcyclohexyl 5-norbornene-2-carboxylate, 2-methyl-2-adamantyl 5-norbornene-2-carboxylate, 2-ethyl-2-adamantyl 5-norbornene-2-carboxylate, 1-(4-methylcyclohexyl)-1-methylethyl 5-norbornene-2-carboxylate, 1-(4-hydroxycyclohexyl)-1-methylethyl 5-norbornene-2-carboxylate, 1-methyl-1-(4-oxocyclohexyl)ethyl 5-norbornene-2-carboxylate, and 1-(1-adamantyl)-1-methylethyl 5-norbornene-2-carboxylate.

The resin preferably has no structural unit having a fluorine atom in a side chain.

The resin can be produced by conducting the polymerization reaction of the corresponding monomer or monomers. The resin can be also produced by conducting the oligomerization reaction of the corresponding monomer or monomers followed by polymerizing the oligomer obtained.

The polymerization reaction is usually carried out in the presence of a radical initiator.

The radical initiator is not limited and examples thereof include an azo compound such as 2,2′-azobisisobutyronitrile, 2,2′-azobis(2-methylbutyronitrile), 1,1′-azobis(cyclohexane-1-carbonitrile), 2,2′-azobis(2,4-dimethylvaleronitrile), 2,2′-azobis(2,4-dimethyl-4-methoxyvaleronitrile), dimethyl-2,2′-azobis(2-methylpropionate) and 2,2′-azobis(2-hydroxymethylpropionitrile); an organic hydroperoxide such as lauroyl peroxide, tert-butyl hydroperoxide, benzoyl peroxide, tert-butyl peroxybenzoate, cumene hydroperoxide, diisopropyl peroxydicarbonate, di-n-propyl peroxydicarbonate, tert-butyl peroxyneodecanoate, tert-butyl peroxypivalate and 3,5,5-trimethylhexanoyl peroxide; and an inorganic peroxide such as potassium peroxodisulfate, ammonium peroxodisulfate and hydrogen peroxide. Among them, the azo compound is preferable and 2,2′-azobisisobutyronitrile, 2,2′-azobis(2-methylbutyronitrile), 1,1′-azobis(cyclohexane-1-carbonitrile), 2,2′-azobis(2,4-dimethylvaleronitrile) and dimethyl-2,2′-azobis(2-methylpropionate) are more preferable, and 2,2′-azobisisobutyronitrile and 2,2′-azobis(2,4-dimethylvaleronitrile) are especially preferable.

These radical initiators may be used alone or in a form of a mixture of two or more kinds thereof. When the mixture of two or more kinds thereof is used, the mixed ratio is not particularly limited.

When the mixture of two kinds thereof is used, the combination of 2,2′-azobis(2,4-dimethylvaleronitrile) and 2,2′-azobisisobutyronitrile, the combination of 2,2′-azobis(2,4-dimethylvaleronitrile) and 2,2′-azobis(2-methylbutyronitrile), the combination of 2,2′-azobis(2,4-dimethylvaleronitrile) and 1,1′-azobis(cyclohexane-1-carbonitrile), and the combination of 2,2′-azobis(2,4-dimethylvaleronitrile) and dimethyl-2,2′-azobis (2-methylpropionate) are preferable, and the mixed ratio thereof is preferably 1/1 to 1/10.

The amount of the radical initiator is preferably 1 to 20% by mole based on all monomer or oligomer molar amounts.

The polymerization temperature is usually 0 to 150° C., and preferably 40 to 100° C.

The polymerization reaction is usually carried out in the presence of a solvent and it is preferred to use a solvent which is sufficient to dissolve the monomer, the radical initiator and the resin obtained. Examples thereof include a hydrocarbon solvent such as toluene; an ether solvent such as 1,4-dioxane and tetrahydrofuran; a ketone solvent such as methyl isobutyl ketone; an alcohol solvent such as isopropyl alcohol; a cyclic ester solvent such as γ-butyrolactone; a glycol ether ester solvent such as propylene glycol monomethyl ether acetate; and an acyclic ester solvent such as ethyl lactate. These solvents may be used alone and a mixture thereof may be used.

The amount of the solvent is not limited, and practically, it is preferably 1 to 5 parts by weight relative to 1 part of all monomers or oligomers.

When an alicyclic compound having an olefinic double bond and an aliphatic unsaturated dicarboxylic anhydride are used as monomers, it is preferable to use them in excess amount in view of a tendency that these are not easily polymerized.

After completion of the polymerization reaction, the resin produced can be isolated, for example, by adding a solvent in which the resin is insoluble or poorly soluble to the reaction mixture obtained and filtering the precipitated resin. If necessary, the isolated resin may be purified, for example, by washing with a suitable solvent.

The present chemically amplified resist composition contains an acid generator.

The acid generator is a substance which is decomposed to generate an acid by applying a radiation such as a light, an electron beam or the like on the substance itself or on a resist composition containing the substance. The acid generated from the acid generator acts on the polymer resulting in cleavage of the acid-labile group existing in the resin.

Examples of the acid generator include an onium salt compound, an organo-halogen compound, a sulfone compound, a sulfonate compound, and the like. The onium salt compound is preferable.

Other examples of the acid generator include acid generators described in JP 2003-5374 A1.

Other examples of the acid generator include a salt represented by the formula (V):

(hereinafter, simply referred to as Salt (V)).

In the formula (V), wherein Y¹ and Y² each independently represent a fluorine atom or a C1-C6 perfluoroalkyl group, R¹² represents a C1-C30 linear, branched chain or cyclic hydrocarbon group which may be substituted with at least one selected from the group consisting of a C1-C6 alkyl group, a C1-C6 alkoxy group, a C1-C4 perfluoroalkyl group, a hydroxyl group and a cyano group, and one or more —CH₂— in the hydrocarbon group may be replaced by —CO—, —O— or —COO—, and A⁺ represents an organic counter ion.

Examples of the C1-C6 perfluoroalkyl group represented by Y¹ and Y² include a trifluoromethyl group, a pentafluoroethyl group, a heptafluoropropyl group, a nonafluorobutyl group, an undecafluoropentyl group and a tridecafluorohexyl group, and a trifluoromethyl group is preferable. Y¹ and Y² each independently is preferably a fluorine atom or a trifluoromethyl group, and is more preferably fluorine atoms.

The C3-C30 monocyclic or polycyclic hydrocarbon group of R¹² may have an alicyclic structure or structures and may have an aromatic group or groups. The C3-C30 monocyclic or polycyclic hydrocarbon group may have a carbon-carbon double bond or bonds.

Examples of the C1-C6 linear or branched chain hydrocarbon group include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, an isobutyl group, a sec-butyl group, a tert-butyl group, an n-pentyl group and an n-hexyl group.

Examples of the C3-C30 monocyclic or polycyclic hydrocarbon group include a hydrocarbon group having a cyclobutane ring, a hydrocarbon group having a cyclopentane ring, a hydrocarbon group having a cyclohexane ring, a hydrocarbon group having a cyclooctane ring, a hydrocarbon group having an adamantane ring, a hydrocarbon group having a benzene ring and a hydrocarbon group having a norbornane ring.

Examples of the C1-C6 alkyl group include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, an isobutyl group, a sec-butyl group, a tert-butyl group, an n-pentyl group and n-hexyl group. Examples of the C1-C6 alkoxy group include a methoxy group, an ethoxy group, an n-propoxy group, an isopropoxy group, an n-butoxy group, an isobutoxy group, a sec-butoxy group, a tert-butoxy group, an n-pentyloxy group and an n-hexyloxy group. Examples of the C1-C4 perfluoroalkyl group include a trifluoromethyl group, a pentafluoroethyl group, a heptafluoropropyl group and a nonafluorobutyl group.

Specific examples of the anion part of Salt (V) include the followings.

Among them, Salt (V) wherein R¹² is a group represented by the following formula:

-Z′-X¹⁰

wherein X¹⁰ represents a C3-C30 monocyclic or polycyclic hydrocarbon group having a hydroxyl group or a carbonyl group, and one or more hydrogen atoms in the monocyclic or polycyclic hydrocarbon group may be replaced by a C1-C6 alkyl group, a C1-C6 alkoxy group, a C1-C4 perfluoroalkyl group, a C1-C6 hydroxyalkyl group, a hydroxyl group or a cyano group and Z′ represents a single bond or a C1-C4 alkylene group, is preferable.

Examples of the C1-C6 alkyl group, the C1-C6 alkoxy group and the C1-C4 perfluoroalkyl group include the same groups as described above, respectively. Examples of the C1-C6 hydroxyalkyl group include a hydroxymethyl group, a 2-hydroxyethyl group, a 3-hydroxypropyl group, a 4-hydroxybutyl group and a 6-hydroxyhexyl group.

Examples of the C1-C4 alkylene group include a methylene group, an ethylene group, a trimethylene group and a tetramethylene group. Z′ is preferably a single bond, a methylene group or an ethylene group, and is more preferable a single bond or a methylene group.

Examples of X¹⁰ include a C4-C8 cycloalkyl group such as a cyclobutyl group, a cyclopentyl group, a cyclohexyl group and a cyclooctyl group, an adamantyl group, and a norbornyl group, in which at least one hydrogen atom may be replaced with a C1-C6 alkyl group, a C1-C6 alkoxy group, a C1-C4 perfluoroalkyl group, a C1-C6 hydroxyalkyl group, a hydroxyl group or a cyano group.

Specific examples of X¹⁰ include a 2-oxocyclopentyl group, a 2-oxocyclohexyl group, a 3-oxocyclopentyl group, a 3-oxocyclohexyl group, a 4-oxocyclohexyl group, a 2-hydroxycyclopentyl group, a 2-hydroxycyclohexyl group, a 3-hydroxycyclopentyl group, a 3-hydroxycyclohexyl group, a 4-hydroxycyclohexyl group, a 4-oxo-2-adamantyl group, a 3-hydroxy-1-adamantyl group, a 4-hydroxy-1-adamantyl group, a 5-oxonorbornan-2-yl group, a 1,7,7-trimethyl-2-oxonorbornan-2-yl group, a 3,6,6-trimethyl-2-oxo-bicyclo[3.1.1]heptan-3-yl group, a 2-hydroxy-norbornan-3-yl group, a 1,7,7-trimethyl-2-hydroxynorbornan-3-yl group, a 3,6,6-trimethyl-2-hydroxybicyclo[3.1.1]heptan-3-yl group, and the following groups (in the following formulae, straight line with an open end shows a bond which is extended from an adjacent group).

Specific examples of the anion part of Salt (V) wherein R¹² is a group represented by the following formula:

-Z′-X¹⁰

include the followings.

In Salt (V), A⁺ represents an organic counter ion. Examples of the organic counter ion include a cation represented by the formula (IXz)

wherein P^(a), P^(b) and P^(c) each independently represent a C1-C30 linear or branched chain alkyl group which may be substituted with at least one selected from the group consisting of a hydroxyl group, a C3-C12 cyclic hydrocarbon group and a C1-C12 alkoxy group, or a C3-C30 cyclic hydrocarbon group which may be substituted with at least one selected from the group consisting of a hydroxyl group and a C1-C12 alkoxy group (hereinafter, simply referred to as the cation (IXz)), a cation represented by the formula (IXb):

wherein P⁴ and P⁵ each independently represent a hydrogen atom, a hydroxyl group, a C1-C12 alkyl group or a C1-C12 alkoxy group (hereinafter, simply referred to as the cation (IXb)), a cation represented by the formula (IXc):

wherein P⁶ and P⁷ each independently represent a C1-C12 alkyl group or a C3-C12 cycloalkyl group, or P⁶ and P⁷ are bonded to form a C3-C12 divalent acyclic hydrocarbon group which forms a ring together with the adjacent S⁺, and at least one —CH₂— in the divalent acyclic hydrocarbon group may be substituted with —CO—, —O— or —S—, P⁸ represents a hydrogen atom, P⁹ represents a C1-C12 alkyl group, a C3-C12 cycloalkyl group or an aromatic group which may be substituted, or P⁸ and P⁹ are bonded to form a divalent acyclic hydrocarbon group which forms a 2-oxocycloalkyl group together with the adjacent —CHCO—, and at least one —CH₂— in the divalent acyclic hydrocarbon group may be replaced with —CO—, —O— or —S— (hereinafter, simply referred to as the cation (IXc)); and a cation represented by the formula (IXd):

wherein P¹⁰, P¹¹, P¹², P¹³, P¹⁴, P¹⁵, P¹⁶, P¹⁷, P¹⁸, P¹⁹, P²⁰ and P²¹ each independently represent a hydrogen atom, a hydroxyl group, a C1-C12 alkyl group or a C1-C12 alkoxy group, B represents a sulfur or oxygen atom and t represents 0 or 1 (hereinafter, simply referred to as the cation (IXd)).

Examples of the C1-C12 alkoxy group in the cations (IXz), (IXb) and (IXd) include a methoxy group, an ethoxy group, an n-propoxy group, an isopropoxy group, an n-butoxy group, an isobutoxy group, a sec-butoxy group, a tert-butoxy group, an n-pentyloxy group, an n-hexyloxy group, an n-octyloxy group and a 2-ethylhexyloxy group.

Examples of the C3-C12 cyclic hydrocarbon group in the cation (IXz) include a cyclopentyl group, a cyclohexyl group, a 1-adamantyl group, a 2-adamantyl group, a phenyl group, a 2-methylphenyl group, a 4-methylphenyl group, a 1-naphthyl group and a 2-naphthyl group.

Examples of the C1-C30 alkyl group which may be substituted with at least one selected from the group consisting of a hydroxyl group, a C3-C12 cyclic hydrocarbon group and a C1-C12 alkoxy group in the cation (IXz) include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, an isobutyl group, a sec-butyl group, a tert-butyl group, an n-pentyl group, an n-hexyl group, an n-octyl group, a 2-ethylhexyl group and benzyl group.

Examples of the C3-C30 cyclic hydrocarbon group which may be substituted with at least one selected from the group consisting of a hydroxyl group and a C1-C12 alkoxy group in the cation (IXz) include a cyclopentyl group, a cyclohexyl group, a 1-adamantyl group, a 2-adamantyl group, a bicyclohexyl group, a phenyl group, a 2-methylphenyl group, a 4-methylphenyl group, a 4-ethylphenyl group, a 4-isopropylphenyl group, a 4-tert-butylphenyl group, a 2,4-dimethylphenyl group, a 2,4,6-trimethylphenyl group, a 4-n-hexylphenyl group, a 4-n-octylphenyl group, a 1-naphthyl group, a 2-naphthyl group, a fluorenyl group, a 4-phenylphenyl group, a 4-hydroxyphenyl group, a 4-methoxyphenyl group, a 4-tert-butoxyphenyl group and a 4-n-hexyloxyphenyl group.

Examples of the C1-C12 alkyl group in the cations (IXb), (IXc) and (IXd) include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, an isobutyl group, a sec-butyl group, a tert-butyl group, an n-pentyl group, an n-hexyl group, an n-octyl group and a 2-ethylhexyl group.

Examples of the C3-C12 cycloalkyl group in the cation (IXc) include a cyclopropyl group, a cyclobutyl group, a cyclopentyl group, a cyclohexyl group, a cycloheptyl group, a cyclooctyl group and a cyclodecyl group. Examples of the C3-C12 divalent acyclic hydrocarbon group formed by bonding P⁶ and P⁷ include a trimethylene group, a tetramethylene group and a pentamethylene group. Examples of the ring group formed together with the adjacent S⁺ and the divalent acyclic hydrocarbon group include a tetramethylenesulfonio group, a pentamethylenesulfonio group and oxybisethylenesulfonio group.

Examples of the aromatic group in the cation (IXc) include a phenyl group, a tolyl group, a xylyl group, a 4-n-butylphenyl group, a 4-isobutylphenyl group, a 4-tert-butylphenyl group, a 4-cyclohexylphenyl group, a 4-phenylphenyl group and a naphthyl group. The aromatic group may be substituted, and examples of the substituents include a C1-C6 alkoxy group such as a methoxy group, an ethoxy group, an n-propoxy group, an n-butoxy group, a tert-butoxy group and an n-hexyloxy group; a C2-C12 acyloxy group such as an acetyloxy group and a 1-adamantylcarbonyloxy group; and a nitro group.

Examples of the divalent acyclic hydrocarbon group formed by bonding P⁸ and P⁹ include a methylene group, an ethylene group, a trimethylene group, a tetramethylene group and a pentamethylene group and examples of the 2-oxocycloalkyl group formed together with the adjacent —CHCO— and the divalent acyclic hydrocarbon group include a 2-oxocyclopentyl group and a 2-oxocyclohexyl group.

Examples of the cation (IXz) include the followings:

Specific examples of the cation (IXb) include the following:

Specific examples of the cation (IXc) include the following:

Specific examples of the cation (IXd) include the following:

Among the cation (IXz), the cation represented by the formula (IXa):

wherein P¹, P² and P³ each independently represent a hydrogen atom, a hydroxyl group, a C1-C12 alkyl group or a C1-C12 alkoxy group, is preferable. Examples of the C1-C12 alkyl group and the C1-C12 alkoxy group include the same as described above.

As the organic counter ion represented by A⁺, a cation represented by the following formulae (IXe):

wherein P²², P²³ and P²⁴ each independently represent a hydrogen atom or a C1-C4 alkyl group, is also preferable.

As the Salt (V), a salt wherein A⁺ is the cation represented by the above-mentioned formula (IXe) and the anion part is any of the followings:

and a salt wherein A⁺ is the cation represented by the above-mentioned formula (IXc) and the anion part is any one of the followings:

are preferable.

For example, Salt (V) wherein R¹² is a group represented by the following formula:

-Z′-X¹⁰

can be produced by a process comprising reacting a salt of the formula (10):

wherein M represents Li, Na, K or Ag, and Y¹, Y², Z′ and X¹⁰ are the same meanings as defined above with a compound of the formula (11):

A⁺⁻G  (11)

wherein A⁺ is the same meaning as defined above, and G represents F, Cl, Br, I, BF₄, AsF₆, SbF₆, PF₆ or ClO₄.

The reaction of the salt of the formula (10) and the compound of the formula (11) is usually conducted in an inert solvent such as acetonitrile, water and methanol, at a temperature of about 0 to 150° C., preferably of 0 to 100° C., with stirring.

The amount of the compound of the formula (11) is usually 0.5 to 2 moles per 1 mole of the salt of the formula (10). The obtained Salt (V) by the process above can be isolated by recrystallization, and can be purified by washing with water.

The salt of the formula (10) used for the production of Salt (V) can be produced by a process comprising esterifying an alcohol compound of the formula (12):

HO-Z′-X¹⁰  (12)

wherein Z′ and X¹⁰ are the same meaning as defined above with a carboxylic acid of the formula (13):

wherein M, Y¹ and Y² are the same meanings as defined above.

The carboxylic acid of the formula (13) can be also produced, for example, by a process comprising esterifying the alcohol compound of the formula (12) with a carboxylic acid of the formula (14):

to obtain an ester compound of the following formula:

wherein Y¹, Y², Z′ and X¹⁰ are the same meanings as defined above and reacting the ester compound obtained above with a compound of the following formula:

M-OH

wherein M is the same meaning as defined above, in water.

The esterification reaction of the alcohol compound and the carboxylic acid can generally be carried out by mixing materials in an aprotic solvent such as dichloroethane, toluene, ethylbenzene, monochlorobenzene and acetonitrile, at 20 to 200° C., preferably 50 to 150° C. In the esterification reaction, an acid catalyst is usually added, and examples of the acid catalyst include organic acids such as p-toluenesulfonic acid, and inorganic acids such as sulfuric acid. The esterification reaction may preferably be conducted with dehydration since the reaction time tends to be shortened. Examples of the dehydration method include Dean and Stark method.

The amount of the carboxylic acid of the formula (13) is usually 0.2 to 3 moles and preferably 0.5 to 2 moles per 1 mole of the alcohol compound of the formula (12).

The amount of the acid catalyst may be catalytic amount or the amount equivalent to solvent, and is usually 0.001 to 5 moles per 1 mole of the alcohol compound of the formula (12).

Salt (V) wherein R¹² is a group represented by the formula:

-Z′-X¹⁰

and X¹⁰ is a C3-C30 monocyclic or polycyclic hydrocarbon group having a hydroxyl group can be also produced by reducing Salt (V) wherein R¹² is a group represented by the following formula:

-Z′-X¹⁰

and X¹⁰ is a C3-C30 monocyclic or polycyclic hydrocarbon group having a carbonyl group.

The salt of the formula (10) wherein R¹² is a group represented by the following formula:

-Z′-X¹⁰

and X¹⁰ is a C3-C30 monocyclic or polycyclic hydrocarbon group having a hydroxyl group can be also produced by reducing the salt of the formula (10) wherein R¹² is a group represented by the following formula:

-Z′-X¹⁰

and X¹⁰ is a C3-C30 monocyclic or polycyclic hydrocarbon group having a carbonyl group.

The reducing reaction described above can generally be carried out using a reducing agent in a solvent such as water, alcohols, acetonitrile, N,N-dimethylformamide, diglyme, tetrahydrofuran, diethyl ether, dichloromethane, 1,2-dimethoxyethane and benzene, at −80 to 100° C. and preferably −10 to 60° C. Examples of the reducing agent include a borohydride compound such as sodium borohydride, zinc borohydride, lithium tri(sec-butyl)borohydride and borane, an aluminum hydride compound such as lithium tri (tert-butoxy) aluminum hydride and diisobutylaluminum hydride, an organic hydrosilane compound such as triethylsilane and diphenylsilane and an organic tin hydride compound such as tributyltin hydride.

The present resist composition preferably includes 80 to 99.9% by weight of the resin comprising the structural unit (I) and 0.1 to 20% by weight of an acid generator based on the total amount of said resin and an acid generator.

In the present resist composition, performance deterioration caused by inactivation of acid which occurs due to post exposure delay can be diminished by adding an organic base compound, particularly a nitrogen-containing organic base compound as a quencher.

Specific examples of the nitrogen-containing organic base compound include an amine compound represented by the following formulae:

wherein T¹ and T¹² independently represent a hydrogen atom, an alkyl group, a cycloalkyl group or an aryl group, and the alkyl, cycloalkyl and aryl group may be substituted with at least one group selected from the group consisting of a hydroxyl group, an amino group which may be substituted with a C1-C4 alkyl group and a C1-C6 alkoxy group which may be substituted with a C1-C6 alkoxy group, T³ and T⁴ independently represent a hydrogen atom, an alkyl group, a cycloalkyl group, an aryl group or an alkoxy group, and the alkyl, cycloalkyl, aryl and alkoxy group may be substituted with at least one group selected from the group consisting of a hydroxyl group, an amino group which may be substituted with a C1-C4 alkyl group and a C1-C6 alkoxy group, or T³ and T⁴ bond together with the carbon atoms to which they bond to form an aromatic ring, T⁵ represent a hydrogen atom, an alkyl group, a cycloalkyl group, an aryl group, an alkoxy group or a nitro group, and the alkyl, cycloalkyl, aryl and alkoxy groups may be substituted with at least one group selected from the group consisting of a hydroxyl group, an amino group which may be substituted with a C1-C4 alkyl group and a C1-C6 alkoxy group, T⁶ represents an alkyl or cycloalkyl group, and the alkyl and cycloalkyl group may be substituted with at least one group selected from the group consisting of a hydroxyl group, an amino group which may be substituted with a C1-C4 alkyl group and a C1-C6 alkoxy group, and W represents —CO—, —NH—, —S—, —S—S—, an alkylene group of which at least one methylene group may be replaced with —O—, or an alkenylene group of which at least one methylene group may be replaced with —O—, and a quaternary ammonium hydroxide represented by the following formula:

wherein T⁷, T⁸, T⁹ and T¹⁰ independently represent an alkyl group, a cycloalkyl group or an aryl group, and the alkyl, cycloalkyl and aryl groups may be substituted with at least one group selected from the group consisting a hydroxyl group, an amino group which may be substituted with a C1-C4 alkyl group and a C1-C6 alkoxy group.

The alkyl group in T¹, T², T³, T⁴, T⁵, T⁶, T⁷, T⁸, T⁹ and T¹⁰ preferably has about 1 to 10 carbon atoms, and more preferably has about 1 to 6 carbon atoms.

Examples of the amino group which may be substituted with the C1-C4 alkyl group include an amino group, a methylamino group, an ethylamino group, an n-butylamino group, a dimethylamino group and a diethylamino group. Examples of the C1-C6 alkoxy group which may be substituted with the C1-C6 alkoxy group include a methoxy group, an ethoxy group, an n-propoxy group, an isopropoxy group, an n-butoxy group, a tert-butoxy group, an n-pentyloxy group, an n-hexyloxy group and a 2-methoxyethoxy group.

Specific examples of the alkyl group which may be substituted with at least one group selected from the group consisting of a hydroxyl group, an amino group which may be substituted with a C1-C4 alkyl group, and a C1-C6 alkoxy group which may be substituted with a C1-C6 alkoxy group include a methyl group, an ethyl group, an n-propyl group, an isopropyl group, an n-butyl group, a tert-butyl group, an n-pentyl group, an n-hexyl group, an n-octyl group, an n-nonyl group, an n-decyl group, a 2-(2-methoxyethoxy)ethyl group, a 2-hydroxyethyl group, a 2-hydroxypropyl group, a 2-aminoethyl group, a 4-aminobutyl group and a 6-aminohexyl group.

The cycloalkyl group in T¹, T², T³, T⁴, T⁵, T⁶, T⁷, T⁸, T⁹ and T¹⁰ preferably has about 5 to 10 carbon atoms. Specific examples of the cycloalkyl group which may be substituted with at least one group selected from the group consisting of a hydroxyl group, an amino group which may be substituted with a C1-C4 alkyl group and a C1-C6 alkoxy group include a cyclopentyl group, a cyclohexyl group, a cycloheptyl group and a cyclooctyl group.

The aryl group in T¹, T², T³, T⁴, T⁵, T⁶, T⁷, T⁸, T⁹ and T¹⁰ preferably has about 6 to 10 carbon atoms. Specific examples of the aryl group which may be substituted with at least one group selected from the group consisting of a hydroxyl group, an amino group which may be substituted with a C1-C4 alkyl group and a C1-C6 alkoxy group include a phenyl group and a naphthyl group.

The alkoxy group in T³, T⁴ and T⁵ preferably has about 1 to 6 carbon atoms and specific examples thereof include a methoxy group, an ethoxy group, an n-propoxy group, an isopropoxy group, an n-butoxy group, a tert-butoxy group, an n-pentyloxy group and an n-hexyloxy group.

The alkylene and alkenylene groups in W preferably have 2 to 6 carbon atoms. Specific examples of the alkylene group include an ethylene group, a trimethylene group, a tetramethylene group, a methylenedioxy group and an ethylene-1,2-dioxy group, and specific examples of the alkenylene group include an ethene-1,2-diyl group, a 1-propene-1,3-diyl group and a 2-butene-1,4-diyl group.

Specific examples of the amine compound include n-hexylamine, n-heptylamine, n-octylamine, n-nonylamine, n-decylamine, aniline, 2-methylaniline, 3-methylaniline, 4-methylaniline, 4-nitroaniline, 1-naphthylamine, 2-naphthylamine, ethylenediamine, tetramethylenediamine, hexamethylenediamine, 4,4′-diamino-1,2-diphenylethane, 4,4′-diamino-3,3′-dimethyldiphenylmethane, 4,4′-diamino-3,3′-diethyldiphenylmethane, dibutylamine, dipentylamine, dihexylamine, diheptylamine, dioctylamine, dinonylamine, didecylamine, N-methylaniline, piperidine, diphenylamine, triethylamine, trimethylamine, tripropylamine, tributylamine, tripentylamine, trihexylamine, triheptylamine, trioctylamine, trinonylamine, tridecylamine, methyldibutylamine, methyldipentylamine, methyldihexylamine, methyldicyclohexylamine, methyldiheptylamine, methyldioctylamine, methyldinonylamine, methyldidecylamine, ethyldibutylamine, ethyldipentylamine, ethyldihexylamine, ethyldiheptylamine, ethyldioctylamine, ethyldinonylamine, ethyldidecylamine, dicyclohexylmethylamine, tris[2-(2-methoxyethoxy)ethyl]amine, triisopropanolamine, N,N-dimethylaniline, 2,6-diisopropylaniline, imidazole, benzimidazole, pyridine, 4-methylpyridine, 4-methylimidazole, bipyridine, 2,2′-dipyridylamine, di-2-pyridyl ketone, 1,2-di(2-pyridyl)ethane, 1,2-di(4-pyridyl)ethane, 1,3-di(4-pyridyl)propane, 1,2-bis(2-pyridyl)ethylene, 1,2-bis(4-pyridyl)ethylene, 1,2-bis(4-pyridyloxy)ethane, 4,4′-dipyridyl sulfide, 4,4′-dipyridyl disulfide, 1,2-bis(4-pyridyl)ethylene, 2,2′-dipicolylamine and 3,3′-dipicolylamine.

Examples of the quaternary ammonium hydroxide include tetramethylammonium hydroxide, tetraisopropylammonium hydroxide, tetrabutylammonium hydroxide, tetrahexylammonium hydroxide, tetraoctylammonium hydroxide, phenyltrimethylamnonium hydroxide, (3-trifluoromethylphenyl)trimethylammonium hydroxide and (2-hydroxyethyl) trimethylamnmonium hydroxide (so-called “choline”)

A hindered amine compound having a piperidine skelton as disclosed in JP 11-52575 A1 can be also used as the quencher.

In the point of forming patterns having higher resolution, the quaternary ammonium hydroxide is preferably used as the quencher.

When the basic compound is used as the quencher, the present resist composition preferably includes 0.01 to 5% by weight of the basic compound based on the total amount of the solid components.

The present resist composition can contain, if necessary, a small amount of various additives such as a sensitizer, a dissolution inhibitor, other polymers, a surfactant, a stabilizer and a dye as long as the effect of the present invention is not prevented.

The present resist composition is usually in the form of a resist liquid composition in which the above-mentioned ingredients are dissolved in a solvent and the resist liquid composition is applied onto a substrate such as a silicon wafer by a conventional process such as spin coating. The solvent used is sufficient to dissolve the above-mentioned ingredients, have an adequate drying rate, and give a uniform and smooth coat after evaporation of the solvent. Solvents generally used in the art can be used.

Examples of the solvent include a glycol ether ester such as ethyl cellosolve acetate, methyl cellosolve acetate and propylene glycol monomethyl ether acetate; an acyclic ester such as ethyl lactate, butyl acetate, amyl acetate and ethyl pyruvate; a ketone such as acetone, methyl isobutyl ketone, 2-heptanone and cyclohexanone; and a cyclic ester such as γ-butyrolactone. These solvents may be used alone and two or more thereof may be mixed to use.

A resist film applied onto the substrate and then dried is subjected to exposure for patterning, then heat-treated to facilitate a deblocking reaction, and thereafter developed with an alkali developer. The alkali developer used may be any one of various alkaline aqueous solution used in the art. Generally, an aqueous solution of tetramethylammonium hydroxide or (2-hydroxyethyl)trimethylammonium hydroxide (commonly known as “choline”) is often used.

It should be construed that embodiments disclosed here are examples in all aspects and not restrictive. It is intended that the scope of the present invention is determined not by the above descriptions but by appended claims, and includes all variations of the equivalent meanings and ranges to the claims.

The present invention will be described more specifically by way of examples, which are not construed to limit the scope of the present invention. The “%” and “part(s)” used to represent the content of any component and the amount of any material used in the following examples and comparative examples are on a weight basis unless otherwise specifically noted. The weight-average molecular weight of any material used in the following examples is a value found by gel permeation chromatography [HLC-8120GPC Type, Column (Three Columns): TSKgel Multipore HXL-M, Solvent: Tetrahydrofuran, manufactured by TOSOH CORPORATION] using polystyrene as a standard reference material.

Monomers used in the following Resin Synthetic Examples are following monomers M1, M2, M3, M4, M5, M6, M7, M8 and M9.

Resin Synthetic Example 1

Into a flask equipped with a stirrer, a condenser and a thermometer, 3.65 g of monomer M1, 22.00 g of monomer M2, 11.77 g of monomer M3 and 20.26 g of monomer M4 were added (monomer ratio; monomer M1: monomer M2: monomer M3: monomer M4=7:32:18:43) under an atmosphere of nitrogen and 1.5 times amount of 1,4-dioxane as much as the amount of all monomers to be used was added thereto to prepare a solution. To the solution, 2,2′-azobisisobutyronitrile and 2,2′-azobis(2,4-dimethylvaleronitrile) was added as an initiator in a ratio of 1 mol % and 3 mol % respectively based on all monomer molar amount, and the resultant mixture was heated at 73° C. for about 5 hours. The reaction solution was poured into a large amount of mixture of water and methanol to cause precipitation. The precipitate was isolated and washed with methanol. As a result, resin having a weight-average molecular weight of about 8,600 and a dispersion degree of 1.83 was obtained in a yield of 87%. This resin had the following structural units. This is called as resin A1.

Resin Synthetic Example 2

Into a flask equipped with a stirrer, a condenser and a thermometer, 2.88 g of monomer M5, 16.00 g of monomer M2, 8.56 g of monomer M3 and 14.73 g of monomer M4 were added (monomer ratio; monomer M5: monomer M2: monomer M3: monomer M4=7:32:18:43) under an atmosphere of nitrogen and 1.5 times amount of 1,4-dioxane as much as the amount of all monomers to be used was added thereto to prepare a solution. To the solution, 2,2′-azobisisobutyronitrile and 2,2′-azobis(2,4-dimethylvaleronitrile) was added as an initiator in a ratio of 1 mol % and 3 mol % respectively based on all monomer molar amount, and the resultant mixture was heated at 73° C. for about 5 hours. The reaction solution was poured into a large amount of mixture of water and methanol to cause precipitation. The precipitate was isolated and washed with methanol. As a result, resin having a weight-average molecular weight of about 8,800 and a dispersion degree of 1.93 was obtained in a yield of 87%. This resin had the following structural units. This is called as resin A2.

Resin Synthetic Example 3

Into a flask equipped with a stirrer, a condenser and a thermometer, 3.04 g of monomer M6, 14.00 g of monomer M2, 7.49 g of monomer M3 and 12.89 g of monomer M4 were added (monomer ratio; monomer M6: monomer M2: monomer M3: monomer M4=7:32:18:43) under an atmosphere of nitrogen and 1.5 times amount of 1,4-dioxane as much as the amount of all monomers to be used was added thereto to prepare a solution. To the solution, 2,2′-azobisisobutyronitrile and 2,2′-azobis(2,4-dimethylvaleronitrile) was added as an initiator in a ratio of 1 mol % and 3 mol % respectively based on all monomer molar amount, and the resultant mixture was heated at 73° C. for about 5 hours. The reaction solution was poured into a large amount of mixture of water and methanol to cause precipitation. The precipitate was isolated and washed with methanol. As a result, resin having a weight-average molecular weight of about 10,100 and a dispersion degree of 1.95 was obtained in a yield of 84%. This resin had the following structural units. This is called as resin A3.

Resin Synthetic Example 4

Into a flask equipped with a stirrer, a condenser and a thermometer, 3.80 g of monomer M7, 22.00 g of monomer M2, 11.77 g of monomer M3 and 20.26 g of monomer M4 were added (monomer ratio; monomer M7: monomer M2: monomer M3: monomer M4=7:32:18:43) under an atmosphere of nitrogen and 1.5 times amount of 1,4-dioxane as much as the amount of all monomers to be used was added thereto to prepare a solution. To the solution, 2,2′-azobisisobutyronitrile and 2,2′-azobis(2,4-dimethylvaleronitrile) was added as an initiator in a ratio of 1 mol % and 3 mol % respectively based on all monomer molar amount, and the resultant mixture was heated at 73° C. for about 5 hours. The reaction solution was poured into a large amount of mixture of water and methanol to cause precipitation. The precipitate was isolated and washed with methanol. As a result, resin having a weight-average molecular weight of about 8,000 and a dispersion degree of 1.75 was obtained in a yield of 85%. This resin had the following structural units. This is called as resin A4.

Examples 1 to 13 and Comparative Examples 1 to 7 Acid Generator Acid Generator S1:

<Resin> Resin A1, A2, A3, A4 <Quencher>

Q1: 2,6-diisopropylaniline Q2: tetrabutylammonium hydroxide Q3: tris[2-(2-methoxyethoxy)ethyl]amine

<Solvent>

Y1: propylene glycol monomethyl ether acetate 170 parts 2-heptanone 35 parts propylene glycol monomethyl ether 20 parts γ-butyrolactone 3 parts

The following components were mixed and dissolved, further, filtrated through a fluorine resin filter having pore diameter of 0.2 μm, to prepare resist liquid.

Resin (kind and amount are described in Table 1)

Acid generator (kind and amount are described in Table 1)

Quencher (kind and amount are described in Table 1)

Solvent (kind is described in Table 1)

TABLE 1 Acid Quencher Resin generator (kind/ Ex. (kind/amount (kind/amount amount PB PEB No. (part)) (part)) (part)) Solvent (° C.) (° C.) Ex. 1 A1/10 S1/1.20 Q1/0.126 Y1 100 100 Ex. 2 A1/10 S1/1.20 Q1/0.126 Y1 100 105 Ex. 3 A1/10 S1/1.38 Q1/0.135 Y1 100 95 Ex. 4 A2/10 S1/1.38 Q1/0.135 Y1 100 95 Ex. 5 A3/10 S1/1.38 Q1/0.135 Y1 100 95 Ex. 6 A1/10 S1/1.38 Q1/0.135 Y1 100 100 Ex. 7 A1/10 S1/1.38 Q1/0.135 Y1 100 105 Ex. 8 A1/10 S1/1.38 Q2/0.220 Y1 100 100 Ex. 9 A2/10 S1/1.38 Q2/0.220 Y1 100 100 Ex. 10 A3/10 S1/1.38 Q2/0.220 Y1 100 100 Ex. 11 A1/10 S1/1.38 Q3/0.270 Y1 100 100 Ex. 12 A2/10 S1/1.38 Q3/0.270 Y1 100 100 Ex. 13 A3/10 S1/1.38 Q3/0.270 Y1 100 100 Comp. A4/10 S1/1.20 Q1/0.140 Y1 100 100 Ex. 1 Comp. A4/10 S1/1.20 Q1/0.140 Y1 100 105 Ex. 2 Comp. A4/10 S1/1.38 Q1/0.135 Y1 100 95 Ex. 3 Comp. A4/10 S1/1.38 Q1/0.135 Y1 100 100 Ex. 4 Comp. A4/10 S1/1.38 Q1/0.135 Y1 100 105 Ex. 5 Comp. A4/10 S1/1.38 Q2/0.220 Y1 100 100 Ex. 6 Comp. A4/10 S1/1.38 Q3/0.270 Y1 100 100 Ex. 7

Silicon wafers were each coated with “ARC-95”, which is an organic anti-reflective coating composition available from Nissan Chemical Industries, Ltd., and then baked under the conditions: 205° C., 60 seconds, to form a 800 Å-thick organic anti-reflective coating. Each of the resist liquids prepared as above was spin-coated over the anti-reflective coating so that the thickness of the resulting film became 0.12 μm after drying. The silicon wafers thus coated with the respective resist liquids were each prebaked on a direct hotplate at a temperature shown in column of “PB” of Table 1 for 60 seconds. Using an ArF excimer stepper (“FPA5000-AS3” manufactured by CANON INC., NA=0.75, 2/3 Annular), each wafer thus formed with the respective resist film was subjected to line and space pattern exposure, with the exposure quantity being varied by 0.5 mJ/cm².

After the exposure, each wafer was subjected to post-exposure baking on a hotplate at a temperature shown in column of “PEB” of Table 1 for 60 seconds and then to paddle development for 60 seconds with an aqueous solution of 2.38 wt % tetramethylammonium hydroxide.

Each of a dark field pattern developed on the organic anti-reflective coating substrate after the development was observed with a scanning electron microscope, the results of which are shown in Tables 2 and 3. The term “dark field pattern”, as used herein, means a pattern obtained by exposure and development through a reticle comprising chromium base surface (light-shielding portion) and linear glass layers (light-transmitting portion) formed in the chromium surface and aligned with each other. Thus, the dark field pattern is such that, after exposure and development, resist layer surrounding the line and space pattern remains on substrate.

Effective Sensitivity (ES): It was expressed as the amount of exposure that the line pattern and the space pattern of 85 nm become 1:1 after exposure and development.

Exposure Latitude (EL): It is expressed as a latitude of the amount of exposure that the line pattern and the space pattern having a line width of 85 nm±10% can be obtained after exposure and development, and it is calculated by the following formula:

EL (%)=(X _(76.5) −X _(93.5))/X _(85.0)×100

wherein X_(76.5) is an amount of exposure when the line width becomes 76.5 nm, X_(93.5) is an amount of exposure when the line width becomes 93.5 μm, and X_(85.0) is an amount of exposure when the line width becomes 85.0 nm.

TABLE 2 Ex. No. ES (mJ/cm²) EL (%) Ex. 1 43 13.6 Ex. 2 35 14.2 Comp. 43 12.3 Ex. 1 Comp. 35 8.7 Ex. 2

TABLE 3 Ex. No. ES (mJ/cm²) EL (%) Ex. 3 50.3 13.0 Ex. 4 54.1 12.3 Ex. 5 44.6 13.3 Ex. 6 39.8 12.8 Ex. 7 32.7 12.0 Ex. 8 38.4 15.2 Ex. 9 41.4 14.6 Ex. 10 34.6 12.4 Ex. 11 28.0 15.2 Ex. 12 29.7 14.6 Ex. 13 25.2 12.6 Comp. 48.7 11.6 Ex. 3 Comp. 37.8 11.5 Ex. 4 Comp. 30.8 8.2 Ex. 5 Comp. 36.6 11.8 Ex. 6 Comp. 26.2 11.8 Ex. 7

Examples 14 to 21 and Comparative Examples 8 to 10

The following components were mixed and dissolved, further, filtrated through a fluorine resin filter having pore diameter of 0.2 μm, to prepare resist liquid.

Resin (kind and amount are described in Table 4)

Acid generator (kind and amount are described in Table 4)

Quencher (kind and amount are described in Table 4)

Solvent (kind is described in Table 4)

TABLE 4 Acid Quencher Resin generator (kind/ Ex. (kind/amount (kind/amount amount PB PEB No. (part)) (part)) (part)) Solvent (° C.) (° C.) Ex. 14 A1/10 S1/1.38 Q1/0.135 Y1 100 95 Ex. 15 A2/10 S1/1.38 Q1/0.135 Y1 100 95 Ex. 16 A3/10 S1/1.38 Q1/0.135 Y1 100 95 Ex. 17 A1/10 S1/1.38 Q1/0.135 Y1 100 100 Ex. 18 A2/10 S1/1.38 Q1/0.135 Y1 100 100 Ex. 19 A3/10 S1/1.38 Q1/0.135 Y1 100 100 Ex. 20 A1/10 S1/1.38 Q3/0.270 Y1 100 100 Ex. 21 A2/10 S1/1.38 Q3/0.270 Y1 100 100 Comp. A4/10 S1/1.38 Q1/0.135 Y1 100 95 Ex. 8 Comp. A4/10 S1/1.38 Q1/0.135 Y1 100 100 Ex. 9 Comp. A4/10 S1/1.38 Q3/0.270 Y1 100 100 Ex. 10

Silicon wafers were each coated with “ARC-29SR”, which is an organic anti-reflective coating composition available from Nissan Chemical Industries, Ltd., and then baked under the conditions: 205° C., 60 seconds, to form a 930 Å-thick organic anti-reflective coating. Each of the resist liquids prepared as above was spin-coated over the anti-reflective coating so that the thickness of the resulting film became 0.11 μm after drying. The silicon wafers thus coated with the respective resist liquids were each prebaked on a direct hotplate at a temperature shown in column of “PB” of Table 4 for 60 seconds. Using an ArF excimer stepper (“XT:1900Gi” manufactured by ASML, NA=1.35), each wafer thus formed with the respective resist film was subjected to line and space pattern exposure, with the exposure quantity being varied stepwise.

After the exposure, each wafer was subjected to post-exposure baking on a hotplate at a temperature shown in column of “PEB” of Table 4 for 60 seconds and then to paddle development for 60 seconds with an aqueous solution of 2.38 wt % tetramethylammonium hydroxide.

Each of a dark field pattern developed on the organic anti-reflective coating substrate after the development was observed with a scanning electron microscope, the results of which are shown in Tables 5 to 7. The term “dark field pattern”, as used herein, means a pattern obtained by exposure and development through a reticle comprising chromium base surface (light-shielding portion) and linear glass layers (light-transmitting portion) formed in the chromium surface and aligned with each other. Thus, the dark field pattern is such that, after exposure and development, resist layer surrounding the line and space pattern remains on substrate.

Effective Sensitivity (ES): It was expressed as the amount of exposure that the line pattern and the space pattern of 42 nm become 1:1 after exposure and development.

Exposure Latitude (EL): It is expressed as a latitude of the amount of exposure that the line pattern and the space pattern having a line width of 42 mm±10% can be obtained after exposure and development, and it is calculated by the following formula:

EL (%)=(X _(37.8) −X _(46.2))/X _(42.0)×100

wherein X_(37.8) is an amount of exposure when the line width becomes 37.8 nm, X_(46.2) is an amount of exposure when the line width becomes 46.2 nm, and X_(42.0) is an amount of exposure when the line width becomes 42.0 nm.

TABLE 5 Ex. No. ES (mJ/cm²) EL (%) Ex. 14 56.5 69.6 Ex. 15 60.5 56.1 Ex. 16 51.9 78.8 Comp. 55.3 44.3 Ex. 8

TABLE 6 Ex. No. ES (mJ/cm²) EL (%) Ex. 17 42.4 34.8 Ex. 18 44.7 33.6 Ex. 19 39.3 35.5 Comp. 40.9 31.5 Ex. 9

TABLE 7 Ex. No. ES (mJ/cm²) EL (%) Ex. 20 39.2 40.1 Ex. 21 41.4 31.5 Comp. 37.5 25.7 Ex. 10

Resin Synthetic Example 5

Into a four-necked flask equipped with a thermometer and a condenser, 27.78 parts of 1,4-dioxane was charged and a nitrogen gas was blown into it for 30 minutes. Under an atmosphere of nitrogen, a solution obtained by mixing 15.00 parts of monomer M8, 5.61 parts of monomer M7, 2.89 parts of monomer M3, 12.02 parts of monomer M9, 10.77 parts of monomer M4, 0.34 parts of 2,2′-azobisisobutyronitorile, 1.52 parts of 2,2′-azobis(2,4-dimethylvaleronitrile) and 63.85 parts of 1,4-dioxane was added dropwise thereto over 2 hours at 73° C. The resultant mixture was heated at 73° C. for 5 hours. The reaction mixture was cooled and was diluted with 50.92 parts of 1,4-dioxane. The resultant mixture was poured into a solution obtained by mixing 481 parts of methanol and 120 parts of ion-exchanged water to cause precipitation. The precipitated polymer was isolated by filtration. The polymer was mixed with 301 parts of methanol, and the resultant mixture was stirred and then filtrated to obtain a resin. This procedure was further repeated twice. The obtained resin was dried under reduced pressure to obtain 37.0 parts of a resin in a yield of 80%. This resin had the following structural units and had a weight-average molecular weight of about 7,883 and a dispersion degree of 1.96. This is called as polymer A5.

Acid Generator Synthetic Example 1

Into a flask, 30 g of 4-hydroxyphenyldiphenylsulfonium perfluorobutanesulfonate and 300 g of dichloromethane were added to prepare a solution. In the flask, a nitrogen gas was blown. To the solution, 17.9 g of N,N-diethylcarbamoyl chloride was added and then 10.5 g of triethylamine was added thereto. The resultant mixture was stirred at room temperature for 1 hour. To the obtained reaction mixture, 100 g of ion-exchanged water was added and an organic layer was obtained by separation. The obtained organic layer was washed with 300 mL of distillated water and then dried over anhydrous magnesium sulfate. Magnesium sulfate was removed by filtration and the obtained filtrate was concentrated. The obtained residue was dried under reduced pressure to obtain 26.7 g of 4-(N,N-diethylaminocarboxy)phenyldiphenylsulfonium perfluorobutanesulfonate.

Example 22

Ten parts of the resin A5, 1.5 parts of 4-(N,N-diethylaminocarboxy)phenyldiphenylsulfonium perfluorobutanesulfonate, 0.105 part of 2,6-diisopropylaniline and a solvent prepared by mixing 255 parts of propylene glycol monomethyl ether, 35 parts of 2-heptanone, 20 parts of propylene glycol monomethyl ether acetate and 3 parts of γ-butyrolactone are mixed and dissolved, further, filtrated through a fluorine resin filter having pore diameter of 0.2 μm, to prepare resist liquid.

The first pattern on the wafer is obtained according to the same manner as that described in Example 1, and then the pattern is hard-baked. Next, the resist liquid prepared above is applied onto the first pattern, and then, is prebaked on a direct hotplate. Using an ArF excimer stepper, the wafer is subjected to line and space pattern exposure to obtain the second pattern formed parallel to the first pattern between the first pattern.

After the exposure, the wafer is subjected to post-exposure baking on a hotplate and then to paddle development with an aqueous solution of 2.38 wt % tetramethylammonium hydroxide.

The resist pattern developed on the wafer after the development is observed with a scanning electron microscope to find out that the second pattern is formed parallel to the first pattern between the first pattern.

The resist pattern can be obtained according to the same manner as that of Example 22, except that resist liquid prepared in Example 2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12 or 13 is used in place of resist liquid prepared in Example 1.

The present resist composition provides a good resist pattern having good effective sensitivity and exposure latitude, and is especially suitable for ArF excimer laser lithography, KrF excimer laser lithography and ArF immersion lithography. 

1. A chemically amplified positive resist composition comprising: a resin comprising a structural unit represented by the formula (I):

wherein R¹ represents a hydrogen atom, a halogen atom, a C1-C4 alkyl group or a C1-C4 perfluoroalkyl group, Z represents a single bond or —(CH₂)_(k)—CO—X⁴—, k represents an integer of 1 to 4, X¹, X², X³ and X⁴ each independently represents an oxygen atom or a sulfur atom, m represents an integer of 1 to 3 and n represents an integer of 0 to 3, and an acid generator.
 2. The chemically amplified positive resist composition according to claim 1, wherein the resin contains a structural unit having an acid-labile group in a side chain in addition to the structural unit represented by the formula (I).
 3. The chemically amplified positive resist composition according to claim 2, wherein the structural unit having an acid-labile group in a side chain is a structural unit represented by the formula (II):

wherein R²¹ represents a hydrogen atom, a halogen atom, a C1-C4 alkyl group or a C1-C4 perfluoroalkyl group, R^(b), R^(c) and R^(d) independently represents a C1-C6 alkyl group or a C3-C12 alicyclic hydrocarbon group, or R^(b) and R^(c) may be bonded to form a C3-C20 cyclic hydrocarbon group which may be substituted, Z″ represents a single bond or —(CH₂)_(r)—COO—, and r represents an integer of 1 to
 4. 4. The chemically amplified positive resist composition according to claim 1, wherein the acid generator is an acid generator represented by the formula (V):

wherein Y¹ and Y² each independently represent a fluorine atom or a C1-C6 perfluoroalkyl group, R¹² represents a C1-C30 linear, branched chain or cyclic hydrocarbon group which may be substituted with at least one selected from the group consisting of a C1-C6 alkyl group, a C1-C6 alkoxy group, a C1-C4 perfluoroalkyl group, a hydroxyl group and a cyano group, and one or more —CH₂— in the hydrocarbon group may be replaced by —CO—, —O— or —COO—, and A⁺ represents an organic counter ion.
 5. The chemically amplified positive resist composition according to claim 4, wherein R¹² in the formula (V) is a group represented by the formula: -Z′-X¹⁰ wherein X¹⁰ represents a C3-C30 monocyclic or polycyclic hydrocarbon group having a hydroxyl group or a carbonyl group, and one or more hydrogen atoms in the monocyclic or polycyclic hydrocarbon group may be replaced by a C1-C6 alkyl group, a C1-C6 alkoxy group, a C1-C4 perfluoroalkyl group, a C1-C6 hydroxyalkyl group, a hydroxyl group or a cyano group and Z′ represents a single bond or a C1-C4 alkylene group.
 6. The chemically amplified positive resist composition according to claim 4, wherein the organic counter ion is a cation represented by the formula (IXe):

wherein P²², P²³ and P²⁴ each independently represent a hydrogen atom, a hydroxyl group, a C1-C12 alkyl group or a C1-C12 alkoxy group.
 7. The chemically amplified positive resist composition according to claim 1, wherein the resin has no structural unit having a fluorine atom in a side chain. 